The Impact of Electric Power, Gas Pressure, and Electrode Distance on Active Species, Electron Temperature, and Density
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Abstract
Helium plasma has been widely used for the production of active species by mixing in other gases which are used for surface modification of metals. Helium plasma is generated using 100 Hz pulsed DC source and its characterization is carried out by using optical emission spectroscopy. The spectra of helium is recorded at filling pressure (0.5-3.0 mbar), source power (25-150 W) and inter-electrode distance (3-5 cm) using Ocean Optics HR 4000 spectrometer. It is found that production of active species of helium strongly depends on discharge parameters. Evolution of the selected emission intensities of He-I and He-II are presented in this thesis. The emission intensities of He-I (501.3 nm and 667.7 nm) as a function of above parameters are used for the determination of electron temperature. The spectroscopic technique based on the measurement of relative intensities of two spectral lines of the same atom is used to evaluate the electron temperature, which is found to vary from 0.82 eV to 1.89 eV depending on the various discharge parameters.
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Pakistan Journal Emerging Science and Technologies (PJEST) in collaboration with Govt. Islamia Graduate College Civil Lines Lahore, Pakistan is licensed under a Creative Commons Attribution-ShareAlike 4.0 International License.
References
A C Dass, Space Plasma Physics vol. 1: Narosa publishing house, 2004.
ISBN-13 : 978-8173195754
Alfred Grill, Cold plasma in Material Fabrication. From fundamentals to applications vol. 1. New York: IEEE press,, 1994. ISBN-13: 978-0780347144
M. B. J. W.Waggoner, K.L.Sutton, H.B.Fannin,. "Novel low power/reduced pressure inductively coupled plasma ionization source for mass spectrometric detection of organotin species," Journal of Analytical Atomic Spectrometry, vol. 13, 1998. DOI:10.1039/A802222D
S. S. J. Millman, . Electronics. New York: McGraw-Hill, 1951.
ISBN 1730191185, 9781730191183
S. D. Popa, "influence of pressure on spectral intensities in a flowing nitrogen
glow discharge," J. Applied Physics, vol. 29, 1996. DOI: https://doi.org/10.18816/r-bits.v5i2.7252
A. Bogaerts, J. Anal. Atom. Spectrum vol. 14, 1994. DOI: 10.1039/A900772E
S. Kajita; N. Ohno; S. Takamura; T. Nakano, "Comparison of He I line intensity ratio method and electrostatic probe for electron density and temperature measurements in NAGDIS-II," PHYSICS OF PLASMAS, vol. 13, 2006. https://doi.org/10.1063/1.2164461
M. V. M. J.Jonkers., "The Excitation Ttemperature In (He) Plasmas,," J. Quantum Spectroscopy. Radioactive transfer, vol. 61, pp. 703-709, 1999. https://doi.org/10.1016/S0022-4073(98)00059-4
M. R. K. S.N. Mazhar, . "Measurement of Plasma electronTemperature and density by using different applied voltage and working pressure in the magnetron sputtering system," International Journal of Engineering and Technology, vol. 3, pp. 1177-1180, 2018.
A. M. A. b. M.H. Elghazaly, M.M. Mansour, M. Gabr, N.M. Elsayed,. "Journal of quantitative spectroscopy & radiative transfer," vol. 97, pp. 58-67, 2006. https://doi.org/10.1016/j.jqsrt.2004.12.029
W. Kohsiek., "Measurement of the electron temperature and density of a helium plasma produced by a hollow cathode arc discharge.," vol. 17, 2002. DOI 10.1088/0032-1028/17/12/007
A. Q. M. A. Naveed, S. Ali, M. Zakaullah, Effects of helium gas mixing on the production of active species in nitrogen plasma, Physics Letters A, vol. 359, pp. 499-503, 2006. https://doi.org/10.1016/j.physleta.2006.07.002
T. N. A. Bengtson, "The concept of constant emission yield in GDOES," Anal Bioanal Chem, vol. 385, pp. 568-585, 2006. DOI 10.1007/s00216-006-0412-7
O. A. T. Kikuchi, M. Wada, T. Ohachi, , "Role of excited nitrogen species in the growth of GaN by RF–MBE," Journal of crystal Growth vol. 292, pp. 221-226, 2006. doi:10.1016/j.jcrysgro.2006.04.019
V. M. Donnelly, "Measurements of plasma electron temperature and electron energy distributions by trace rare gases optical emission spectroscopy,," J. Phys. D: Appl. Phys, vol. 37, 2004. DOI: 10.1080/10519990601125151
E. E. S. R. F. Boivin, "Electron temperature measurement by a helium line intensity ratio method in helicon plasmas.," J. Plasma Physics, vol. 12, pp. 5303 - 5314, 2001. https://doi.org/10.1063/1.1418020
D. S. H. N. N. Sesi, P. Galley, J. Homer, M. Huang, G.M. Hieftje, , "An imaging based instrument for fundamental plasma studies,," J. spectrochim. Acta, vol. 52, 1997. https://doi.org/10.1016/S0584-8547(96)01562-5
W. L. Holtgreven, Plasma Diagnostics. New York: John Wiley & Sons,, 1968. ISBN-13 : 978-0720401370
T. N. A. Bengtson., "The concept of constant emission yield in GDOES," Analysis of Bioannual Chem, vol. 385, pp. 568- 585, 2006. DOI: 10.1007/s00216-006-0412-7
M. W. T. Kikuchi., T. Ohachi,, "Role of excited nitrogen species in the growth of GaN by RF–MBE," Journal of Crystal growth, vol. 292, pp. 221-226, 2006. doi:10.1016/j.jcrysgro.2006.04.019
A. Q. M.A.Naveed., S. Ali,, "Effects of helium gas mixing on the production of active species in nitrogen plasma," J. Physics Letters, vol. 359, pp. 499-503, 2006. https://doi.org/10.1016/j.physleta.2006.07.002